Nanochem
Nanochem
Developed by Matheson Tri-Gas, Inc., our US-based affiliate, Nanochem purifiers are designed to purify
specialty material gas (semiconductor material gas).
PuriFilter
PuriFilter is a compact in-line purifier for point-of-use small
flow rate purification.
The cartridge contains a highly efficient purification
medium and filter to remove both impurity gases
and particles.
Features
- PuriFilter is compact and a direct replacement for
in-line particle filters. - Built-in poppet valves at the inlet and outlet limit
media exposure to atmospheric air during purifier
installation.
Specifications
- Connections: 1/4” VCR male fittings for both inlet and
outlet (Use the special gasket supplied with the
fittings.) - Dimensions: Total length of 84.1 mm and outer
diameter of 38.1 mm - Maximum working pressure: 0.98 MPa
- Maximum operating temperature: 70°C
- Built-in filter: 0.003 μm
- Flow rate: Up to 3 L/min*1
- Useful life: Approximately 2,200 hours under the
conditions below*2
Gas type:Nitrogen
Flow rate:1 L/min in continuous operation
Impurity concentration:Oxygen:1 ppm and water:2 ppm
- *1 The flow rate shown is the rate at which nitrogen
- can physically flow, not the flow rate at which
- impurities can be removed. Contact us for more
- information on the maximum flow rate at which
- purification can be performed under specific
- conditions and about the flow rate characteristics
- (pressure loss).
- *2 Useful life varies with conditions. Contact us for
- information on useful life under specific
- conditions.
L-Series
L-Series are wall-mounted purifiers with a maximum purification flow rate of 150 L/min.
Features
- Various size options are available, to meet different requirements.
- Provided with an end-point detector to issue a signal when 75% of the purification medium is consumed.*1
Specifications
- Connections: Female inlet and male outlet 1/4” VCR fittings
- Maximum working pressure: 0.98 MPa
- Maximum operating temperature: 70°C
- Built-in filter: 0.003 μm
- Useful life: Contact us for information on useful life under specific conditions.*2
Flow rate*3*4
| Model | L-60 | L-300 | L-500 | L-2000 |
|---|---|---|---|---|
| Maximum working flow rate (L/min) | 850 | 15 (50) | 50 (75) | 50 (150) |
- *1 End-point detector is not available with the L-60.
- *2 Useful life varies with conditions. Contact us for information on useful life under specific conditions.
- *3 Flow rates shown are the rates at which nitrogen can physically flow, not flow rates at which impurities can be removed.Contact us for more information on the maximum flow rate at which purification can be performed under specific conditions and about flow rate characteristics (pressure loss).
- *4 Flow rates in parentheses are those achieved when nitrogen is to be purified with an inlet pressure of 0.69 MPa and using the High Flow option.