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Waste gas abatement system

Many gases used in the semiconductor industry are flammable, pyrophoric, or corrosive. Processes within the semiconductor industry also use various PFC gases with high GWP (Global Warming Potential). Exhaust gas treatment systems (abatement systems) are designed to safely and completely detoxify such gases. TAIYO NIPPON SANSO has extensive experience in the development, design, and manufacture of exhaust gas treatment (abatement) equipment. Drawing on this expertise, we provide optimal systems to meet your specific requirements. We design, manufacture, and sell purifiers, abatement systems and scrubbers, and monitoring equipment, and perform related piping work.

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