VEGA-JGS dry abatement system
The VEGA-JGS is designed to perform thorough abatement
using an optimal adsorbent for the target gas.
Various size options are available, ranging from a
compact system designed for research use to a
large system for factory use.
Features
- Dry adsorbent chemically fixes semiconductor material gas for complete detoxification.
- Model M offers two adsorbent columns, switching between them to enable long-term continuous operation.
- The system employs a simple dry process, requiring no draining facilities.
Specifications
| Type | Type 5 | Type 20 | Type 50 | Type 100 | Type 200 | |
|---|---|---|---|---|---|---|
| Maximum throughput (L/min) |
25 | 100 | 250 | 500 | 1000 | |
| Column diameter (mm) |
101.6 | 203.2 | 304.8 | 457.2 | 660.4 | |
| Adsorbent volume (L/column) |
5.5 | 22 | 55 | 110 | 220 | |
| Dimensions W×D×H (mm) |
Single column model | 500 × 450 × 1700 | 550 × 500 × 1700 | 650 × 600 × 1900 | 800 × 700 × 1900 | 1000 × 900 × 1900 |
| Dual column changeover model | ー | ー | 1150 × 600 × 1900 | 1400 × 700 × 1900 | 1800 × 900 × 1900 | |
| Maintenance space （No control panel） |
Front:500 | Front:550 | Front:650 | Front:800 | Front:1000 | |
| Maintenance space （Control panel on a side） |
Front:500 and left（viewed facing the system） :1000 |
Front:550 and left（viewed facing the system） :1000 |
Front:650 and left（viewed facing the system） :1000 |
Front:800 and left（viewed facing the system） :1000 |
Front:1000 and left（viewed facing the system） :1000 |
- ※Blower and Filter are option.
- ※We will propose the optiomal adsorbent and column size based on gas type and flow rates.