Air-Cooling Burner
This burner is designed to efficiently burn and degrade flammable gases, toxic gases, PFCs and other persistent gases discharged in CVD or etching processes while minimizing the generation of byproducts (e.g., NOx and CO).
Water-Cooling Combustion-Type Burner (Fossil-Fuel Model)
The combustion decomposition ability of SaaN Burner is inherited, and the exhaust gas is water-cooled to suppress the exhaust air volume. The built-in scrubber type can also process by-products such as HF.
Water-Cooling Combustion-Type Burner (Hydrogen-Fuel Model)
By adapting the fuel of the water-cooled combustion burner Blisters Burner from fossil fuel to hydrogen gas, direct emissions of greenhouse gas CO2 due to fuel combustion are eliminated.
Hercules Burner (Hydrogen Burner for SiC and GaN)
This burner is a combustion abatement system that uses H2 gas in exhaust gas from a SiC epitaxial reactor or a GaN-MOCVD system as fuel for combustion.
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