Water-Cooling Combustion-Type Burner (Fossil-Fuel Model)
Blisters Burner
Blisters Burner is a new water-cooling combustion-type exhaust gas treatment equipment developed as a successor to our existing models CooL Burner, Little CooL, and Corona Burner.
The burner combusts and decomposes in a highly efficient manner toxic and/or persistent gases such as PFCs emitted from CVD, etching, LED, EPI, GaN, PV, and various other processes while controlling by-products, such as NOX and CO.
Depending on the throughput you need, you can select one of three types: Blisters Burner 125, 500, and 1000.
*We can also propose air-cooling types that do not use water.
Features
- Unitization for improved maintainability
- Reduced maintenance cost This model requires fewer replacement parts.
- Water seal bubbling structure reduces the frequency of cleaning and maintenance
- Increased throughput The throughput of this model is 20% higher than that of our existing models.
- Reduced footprint The space required for the installation and maintenance of this model is about 40% smaller than that of our existing models.
- Built-in exhaust suction device (ejector or exhaust fan)
- On-demand operation function provided as a standard feature
- Automatic burner washing function (available as an option)
Treatable Gases (Examples)
| Target equipment | Gas types (examples) | |
|---|---|---|
|
LP-CVD, ALD, W-CVD,P-CVD, diffusion furnaces |
Depo | SiH4, NH3, N2O, SiH2Cl2, TEOS, O3, WF6, various precursors, etc. |
| CLN | NF3, ClF3, HCl, etc. | |
| Various types of etching equipment | HBr, BCl3, Cl2, SiCl4, C4F6, CF4, C2F6, SF6, CHF3, etc. | |
| SiC-EPI, GaN-EPI | SiH4, NH3, H2, HCl, C3H8, SiHCl3 | |
Specifications
| Series | Blisters Burner 125 | Blisters Burner 500 | Blisters Burner 1000 | |
|---|---|---|---|---|
| Fuels used | City gas, propane, C2H4 | |||
| Maximum throughput(slm) | 125 | 500 | 1,000 | |
| Number of treatment ports | 1 | 1 - 4 | 1 - 5 | |
| Dimensions(mm) | W | 900 | 1,000 | 1,200 |
| D | 900 | 1,000 | 1,200 | |
| H *1 | 2,000 | 2,000 | 2,000 | |
| Maintenance space(mm) | Front | 800 | ||
| Rear | 800 | |||
| Utilities | Electricity, N2, air, industrial water, O2 *2, exhaust gas, enclosure exhaust gas | |||
*2 Needed for treating emissions containing persistent gases