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Getter purification (Ar and He)

System

Gas purified: Ar and He
Models: Ar: TPAG / He: TPRG / H2: TPHG
Purification system
Removes impurities via special getter.

Guaranteed specifications

Impurities INLET OUTLET
ppb ppb
N2 2000 ≦0.1
CH4 100 ≦0.1
O2 100 ≦0.1
CO2 100 ≦0.1
CO 100 ≦0.1
H2* 100 ≦0.5
H2O 2600 ≦0.1
Particles ≦1pce/cft,≧0.1μm
Pressure 0.5MPaG ≧0.4MPaG
  • Hydrogen purifiers are also available. (Only for Ar and He)
  • Contact us for custom specifications.

Standard specifications

Series Throughput (Nm3/h) Dimensions W×D×H (mm)
1400 1 600×400×1100
3 600×400×1100
6 600×500×1550
10 700×500×1650
15 900×600×1750
20 900×600×1750
30 1100×700×1800

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