Getter purification (Ar and He)
System
- Gas purified: Ar and He
- Models: Ar: TPAG / He: TPRG / H2: TPHG
- Purification system
- Removes impurities via special getter.
Guaranteed specifications
| Impurities | INLET | OUTLET |
|---|---|---|
| ppb | ppb | |
| N2 | 2000 | ≦0.1 |
| CH4 | 100 | ≦0.1 |
| O2 | 100 | ≦0.1 |
| CO2 | 100 | ≦0.1 |
| CO | 100 | ≦0.1 |
| H2＊ | 100 | ≦0.5 |
| H2O | 2600 | ≦0.1 |
| Particles | － | ≦1pce/cft,≧0.1μm |
| Pressure | 0.5MPaG | ≧0.4MPaG |
- Hydrogen purifiers are also available. (Only for Ar and He)
- Contact us for custom specifications.
Standard specifications
| Series | Throughput (Nm3/h) | Dimensions W×D×H (mm) |
|---|---|---|
| 1400 | 1 | 600×400×1100 |
| 3 | 600×400×1100 | |
| 6 | 600×500×1550 | |
| 10 | 700×500×1650 | |
| 15 | 900×600×1750 | |
| 20 | 900×600×1750 | |
| 30 | 1100×700×1800 |