Cryogenic purification (H2 and He)
Cryogenic purification (H2 and He)
System
- Gases purified: H2 and He
- Models: H2: TPHL / He: TPRL
- Purification system
- Adsorbs and removes O2, CO2, CO, CH4, N2, and H2O in an adsorbent column cooled to very low temperature.
Guaranteed specifications
| Impurities | INLET | OUTLET |
|---|---|---|
| ppb | ppb | |
| O2 | 5000 | ≦0.1 |
| CO2 | 1000 | ≦0.1 |
| CO | 1000 | ≦0.1 |
| CH4 | 1000 | ≦0.1 |
| N2 | 50000 | ≦0.1 |
| H2O | 10000 | ≦0.5 |
| Particles | － | ≦1pce/cft, ≧0.1μm |
| Pressure | 0.7MPaG | ≧0.6MPaG |
Standard specifications
| Series | Throughput (Nm3/h) | Dimensions W×D×H (mm) |
|---|---|---|
| 1400 | 10 | 1500×1400×2100 |
| 30 | 2000×1600×2300 | |
| 50 | 2000×1600×2300 | |
| 100 | 2200×1700×2950 | |
| 150 | 2200×1700×2950 | |
| 200 | 2600×1900×2950 | |
| 250 | 2600×1900×2950 | |
| 300 | 3000×2100×2950 | |
| 500 | 3000×2100×3000 |