In-line Purifier (LPI)
The LPI is a small, in-line purifier designed to perform gas
purification immediately before semiconductor fabrication
equipment.
Specifications
- Working pressure：0.97 MPaG or less
- Operating temperature：Normal temperature
- Material：Housing / SUS316L EP
Filter / SUS316L(0.01μm) - Fittings：1/4” VCR (male)
Type / purity of treated gas
OP (for N2 and Ar) / H2 and H2O: Not exceeding 1 ppb each
N2 (for N2 and Ar) / O2 and H2O: Not exceeding 1 ppb each
P (for O2) / H2 and H2O: Not exceeding 5 ppb each
P (for H2) / O2 and H2O: Not exceeding 1 ppb each
*Inlet impurity concentrations are 100 ppb or less for each impurity to be removed.
Standards
| Model | Recommended flow rate (L/min) | Throughput (Nm3) | Dimensions (mm) |
|---|---|---|---|
| LPI-1-□ | ≦ 0.5 | 270 | φ40×218.8 |
| LPI-5-□ | ≦ 3 | 1,620 | Φ40×298.8 |
| LPI-20-□ | ≦ 10 | 5,400 | φ48.6×323.2 |
| LPI-50-□ | ≦ 30 | 16,200 | φ48.6×470.2 |