Water-cooling burners
Cool Burner
Cool Burner is designed to cool exhaust gas with water to
minimize the flow of the gas with the same degradation
capacity as the SaaN Burner.
The model with a built-in scrubber also treats byproducts,
including HF.
Features
- Gas flow reduction
- Lowers the temperature of exhaust gas with water to minimize flow, thereby reducing subsequent process machinery and piping costs.
- HF removal
- Model with built-in scrubber removes HF and other acidic
ingredients within the system.
Treatment capacity
| Gases |
Maximum concentration |
Outlet concentration |
Degradation rate |
|---|---|---|---|
| SiH4 | 2 | ≦ 5 | － |
| NF3 | 2.5 | ≦ 10 | － |
| C2F6 | 5 | － | ≧ 95 ※1 |
| WF6 | 5 | － | ≧ 90 ※2 |
-
*1 Maximum throughput is half the standard capacity.
*2 This rate only applies to the SBRN-6000 Series.
The table shows typical gases. Contact us for other types of gas.
Specifications
| Series | Cool | Little Cool | |||
|---|---|---|---|---|---|
| Standard (1000Series)､ 6000 Series |
Oxygen adding type (3000 Series） |
Standard (1000Series)､ 6000 Series |
Oxygen adding type (3000 Series） |
||
| Cooling system | CVD | ETCH | CVD | ETCH | |
| Target equipment | Supports high concentration | Supports high concentration | Supports high concentration | Supports high concentration | |
| Maximum throughput （Flow rate of base gas in exhaust） |
800 | 800 ※400 if CF4 is contained |
400 | 400 ※400 if CF4 is present |
|
| Number of burners | 1 | 1 | 1 | 1 | |
| Number of inlet ports | 1～4 | 1 | 1～4 | 1 | |
| Dimensions (mm) |
W | 1650 | 1650 | 1400 | 1400 |
| D | 1200 | 1200 | 1000 | 1000 | |
| H | 1950 | 1950 | 1650※ | 1650※ | |
| maintenance space(mm) | Front and right side: 800 Rear: 800 |
Front and right side: 800 Rear: 800 |
Front: 800 Rear: 800 |
Front: 800 Rear: 800 |
|
*Excludes exhaust fan height.
Corona Burner (water-cooling)
This burner is a high flow rate combustion abatement
system, ideally suited for the treatment of exhaust gas
discharged in large volumes from production equipment,
e.g., at a PV or LCD factory.
Features
- High flow rate treatment
-
High-speed swirl flow of combustion gas enables abatement at high flow rates.
The system supports throughputs of up to 5 m3/min. - Initial cost reduction
-
Simplified burner tip structure dramatically reduces manufacturing costs.
- Enhanced maintainability
- Simplified structure also offers enhanced ease of maintenance.
Specifications
| Series | 1000 | |
|---|---|---|
| Cooling system | Water-cooling | |
| Target equipment | CVD | |
| Maximum throughput （Flow rate of base gas in exhaust） |
1000 | |
| Number of burners | 1 | |
| Number of inlet ports | 1～6 | |
| Dimensions (mm) |
W | 1600 |
| D | 1200 | |
| H | 1950 | |
| maintenance space(mm) | Front,right side, and rear 800 |
|