Hydrogen Burner for SiC and GaN
Hydrogen Burner for SiC and GaN (Hercules Burner)
Hercules Burner is a combustion abatement system using
H2 gas in exhaust gas from a SiC epitaxial reactor or a
GaN-MOCVD system as fuel for combustion.
- Fossil fuel-free combustion
- Emits 80 to 90% less carbon dioxide.
- Use of H2 gas in exhaust gas
- Reduces fuel requirements to reduce operating costs.
- Enhanced combustion efficiency allows smaller
- 60% smaller footprint
|Cooling system||Air cooling||Water/air cooling||Water-cooling||Air cooling||Water/air cooling||Water-cooling|
|Target equipment||GaN-Epi(LED and power device),SiC-EPI,or other equipment discharging
large volumes of H2
（Flow rate of base gas in exhaust）
|Number of burners||1||1||1||1||1||1|
|Number of inlet ports||1||1||1||1～4||1～4||1～4|
|maintenance space(mm)||Entire circumference:800||Entire circumference:800||Entire circumference:800||Entire circumference:800||Entire circumference:800||Entire circumference:800|
*Excludes exhaust fan height