Hydrogen Burner for SiC and GaN
(Hercules Burner)
Hydrogen Burner for SiC and GaN (Hercules Burner)
Hercules Burner is a combustion abatement system using
H2 gas in exhaust gas from a SiC epitaxial reactor or a
GaN-MOCVD system as fuel for combustion.
Features
- Fossil fuel-free combustion
- Emits 80 to 90% less carbon dioxide.
- Use of H2 gas in exhaust gas
- Reduces fuel requirements to reduce operating costs.
- Enhanced combustion efficiency allows smaller
dimensions. - 60% smaller footprint
Specifications
| Series | 1000 | ||||||
|---|---|---|---|---|---|---|---|
| Cooling system | Air cooling | Water/air cooling | Water-cooling | Air cooling | Water/air cooling | Water-cooling | |
| Target equipment | GaN-Epi(LED and power device),SiC-EPI,or other equipment discharging large volumes of H2 |
||||||
| Maximum throughput （Flow rate of base gas in exhaust） |
1000 | 1000 | 1000 | 4000 | 4000 | 4000 | |
| Number of burners | 1 | 1 | 1 | 1 | 1 | 1 | |
| Number of inlet ports | 1 | 1 | 1 | 1～4 | 1～4 | 1～4 | |
| Dimensions (mm) |
|||||||
| W | 1200 | 1600 | 1200 | 2000 | 2000 | 2000 | |
| D | 1100 | 1100 | 1100 | 1200 | 1200 | 1200 | |
| H | 1950※ | 1950※ | 1950※ | 2200※ | 2200※ | 2200※ | |
| maintenance space(mm) | Entire circumference:800 | Entire circumference:800 | Entire circumference:800 | Entire circumference:800 | Entire circumference:800 | Entire circumference:800 | |
*Excludes exhaust fan height