Air cooling burners
SaaN Burner
SaaN Burner is designed to efficiently burn and degrade flammable gases, toxic gases, PFCs and other persistent gases discharged in CVD or etching processes while minimizing
the generation of byproducts (e.g., NOx and CO).
Features
- Cold wall
- The air curtain prevents powder deposition
Treatment capacity
| Gases |
Maximum concentration |
Outlet concentration |
Degradation rate |
|---|---|---|---|
| SiH4 | 2 | ≦ 5 | － |
| NF3 | 2.5 | ≦ 10 | － |
| C2F6 | 5 | － | ≧ 95 ※1 |
| WF6 | 5 | － | ≧ 90 ※2 |
-
*1 Maximum throughput is half the standard capacity.
*2 This rate only applies to the SBRN-6000 Series.
The table shows typical gases. Contact us for information on other types of gas.
Specifications
| Series | 3000（oxygen）,5000,and 6000（W-CVD) | |||||||
|---|---|---|---|---|---|---|---|---|
| Cooling system | Water-cooling | |||||||
| Target equipment | CVD | |||||||
| Maximum throughput （Flow rate of base gas in exhaust） |
400 | 400× 2lines |
400× 4lines |
800 | 800× 2lines |
1000 | 2000 | |
| Number of burners | 1 | 2 | 3～4 | 1 | 2 | 1 | 1 | |
| Number of inlet ports/equipment | 1～４ | 2～6 | 3～6 | 1～４ | 2～6 | 1～４ | 1～４ | |
| Dimensions (mm) Upright |
W | 800 | 1500 | 1600 | 2000 | 2000 | 2000 | 2200 |
| D | 1400 | 800 | 1100 | 900 | 1100 | 1000 | 1200 | |
| H | 1150 (1900:include electrical unit） |
1950 | 1950 | 1700 | 1950 | 1700 | 1700 | |
| Maintenance space (mm) |
Front,rear,and one side(right or left) 800 |
Entire circumference 800 |
Entire circumference 800 |
Entire circumference 800 |
Entire circumference 800 |
Entire circumference 800 | Entire circumference 1000 |
|
*Treatment per burner