Combustion abatement systems
Air cooling burners
This burner is designed to efficiently burn and degrade flammable
gases, toxic gases, PFCs and other persistent gases discharged in
CVD or etching processes while minimizing the generation of
byproducts (e.g., NOx and CO).
Water-cooling buners
This burner is designed to cool exhaust gas with water to
minimize the flow of the gas while retaining the same
degradation capacity as the SaaN Burner.The model with a built-in
scrubber also treats byproducts, including HF.
Hercules Burner
(Hydrogen Burner for SiC and GaN)
This burner is a combustion abatement system that uses
H2 gas in exhaust gas from a SiC epitaxial reactor or
a GaN-MOCVD system as fuel for combustion.