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Plasma abatement > VEGA PLASMA

VEGA-PLASMA
VEGA-PLASMA is PFC gases abatement system which adopted an atmospheric pressure microwave plasma method.
Features
   ●  This abatement system can decompose PFC gas like SF6 and CF4 in high efficiency
   ●  COO is reduced by Atmospheric plasma method.
   ●  A fuel gas is unnecessary.
VEGA-PLASMA
VEGA-PLASMA
Specification
Maximum Flow Rate
(L/min)
Decomposition rate
(%)
dimensions
W×D×H(mm)
Electric Power
(kW)
N2
(L/min)
Dry Air
(L/min)
Water
(L/min)
120 ≧98 900×900×1600 10-14 4 2 3
※  Maximum flow rate of CF4 and CO is to 80L/min.
※  Other than the above, Ar (0.6 - 0.9MPa) 50 L/min (only at the time of the ignition) is necessary.