TAIYO NIPPON SANSO

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Industrial specialty gas > Abatement Scrubber

Many kinds of gases used for semiconductor manufacturing has the characteristics, such as flammability, hypergolic, corrosive, and toxicity. Moreover, PFC gas also has high GWP (global warming potentials).
An exhaust gas abatement system (scrubber) is the equipment which carries out detoxication processing of these gases safely and certainly.
Taiyo Nippon Sanso is performing development, design, and manufacture of an exhaust gas abatement system over many years, and offers the optimal equipment for customer.
Process    Abatement
system
Lineup
    CVD Combustion    
・Deposition gas
 (SiH4、NH3)treatment
・Cleaning gas
 (C2F6、NF3)treatment
 Processing volume :
 large
   
    Etcher Plasma    
・Etching gas
 (CF4、SF6) treatment
 Processing volume :
 large
    Ion
  Implantatio
Adsorption    
・Dopant gas
 (low concentrations
  AsH3、PH3)
 treatment