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Burner abatement > SAAN COOL HERCULES CORONA BURNER

The Air Cooling burner
  Saan Burner
Air cooling type combustion abatement system. This burner Safely handles flammability gases, toxic gases and PFC gases which CVD and Etching process exhaust. It maintain minimum level of by-product NOx or CO.
Features
   ●  Cold-wall
The Air curtain prevents the powder deposition.
空冷燃焼式バーナー Saan Burner
Saan Burner
Capacity
Gases ※1 Maximum Inlet Concentration
(%)
Outlet Concentration
(ppm)
Decomposition rate(%)
SiH4 2 ≦ 5
NF3 2.5 ≦ 10
C2F6 5 ≧ 95 ※2
WF6 5 ≧ 90 ※3
※1  There are typical gas only. For other gases, please get in touch with us.
※2 Maximum flow rate is about half of standard type.
※3 Complies with SaaN Burner 6000 series
Specification
Series 3000 1000 / 6000
Gases
(Max abated concentration 5%)
CF4、SF6etc SiH4、NH3、NF3、N2O、C2F6、C3F8 etc
6000 series for WF6 abatement.
Maximum flow rate
(L/min including N2)
200 200 400 800
Burners 1 1 1 1
Inlet port 1~4 1~2 1~4 1~4
Dimensions (mm) 1700 1500 1500 1700
1000 800 800 1000
1950 1950 1950 1950
Maintenance space (mm) 700(All around)
1000(Right side)
600(All around) 600(All around) 700(All around)
1000(right side)
※1  burner capacity
Water cooling burner
  Cool Burner
Cool Burner is what Combustion capacity is same as SaaN Burner. Exhaust gas flow rate can be reduced by water cooling. Built in scrubber type Safely handles by-products such as HF.
Features
   ●  Reducing of exhaust gas flow rate
Cool Burner lower exhaust gas temperature by water cooling, and can reduce exhaust flow rate. As a result, facilities cost can be reduced.
   ●  Removal of HF
Built-in scrubber type can remove acid component such as HF.
Capacity
Gases ※1 Maximum Inlet concentration
(%)
Outlet Concentration
(ppm)
Decomposition rate
(%)
SiH4 2 ≦ 5
NF3 2.5 ≦ 10
C2F6 5 ≧ 95 ※2
※1  There are typical gas only. For other gases, please get in touch with us.
※2  Maximum flow rate is about half of standard type.
Specification
Series 3000 1000 1000
(built-in scrubber type)
Gases (Max concentration 5%) CF4、SF6 etc C2F6、SiH4、NH3、SF6 etc
Maximum flow rate ※1
(L/min including N2)
200 800 300 500
Burners 1 1 1 1
Inlet port 1~4 1~4 1~4 1~4
Dimensions (mm) 1600 1600 1000 (1000) 1000 (1100)
1200 1200 1000 (1000) 1000 (1100)
2050 2050 1000 (1600) 1600 (1600)
Maintenance spaces (mm) 800 (All around) 800 (All around) 1000 (front)
800 (1 side)
1000 (front)
800 (1 side)
※1  burner capacity
※2  Specifications for Built-in Scrubber type are shown in brackets.
H2burner for SiC and GaN
  Hercules Burner
Hercules Burner is combustion type exhaust gas abatement system. This burner can use H2 gas of SiC or GaN process exhaust gas as combustion fuels.
Features
   ●  This combustion method does not use a fossil fuel.
Carbon dioxide emission is reduced conventional ratio 80-90%.
   ●  H2 gas in the process exhaust gas is used effectively as combustion fuels.
   ●  COO is reduced due to combustion fuel decreasing.
   ●  The miniaturization by improvement of combustion efficiency. The conventional ratio of foot print is reduced 60%.
Hercules Burner
Hercules Burner
Specification
Series 1000
Cooling method Air cooling Water shower Cooling Water cooling
Gases(Maximum inlet concentration 5%) NH3,H2 etc
Maximum flow rate
(L/min, included N2)
1000 1000 1000
burners 1 1 1
inlet port 1~4 1~4 1~4
Dimensions (mm) 1200 1600 1600
1000 1000 1000
1950 1950 1950
Maintenance spaces (mm) 1000(front)
800(both sides)
1000(front)
800(both sides)
1000(front)
800(both sides)
※1  burner capacity
Large flow rate burner for PV and FPD
  Corona Burner
Corona Burner is combustion type exhaust gas abatement system. This burner is corresponding to large flow rate from CVD process exhaust gas, such as PV and LCD factory.
Features
   ●  Corona Burner adopted Highspeed swirling flow method for large flow rate combustion of exhaust gas.
   ●  Flow rate capacity is maximum 5m3/min.
   ●  Productions cost is reduced by simplification of burner structure.
   ●  Improved maintainability by simple structures.
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Saan Burner
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Corona Burner
Burner structure
Specification
Series 1000
Cooling method Air cooling Water shower Cooling Air cooling Water shower cooling Air cooling Water shower Cooling
Gases(Maximum inlet concentration 5%) SiH4,NH3,NF3,C2F6,C3F8 etc
Maximum flow rate (L/min , included N2) 1000 3000 5000
Burners 1 1 1
Inlet port 1~6 1~6 1~10
Dimension (mm) Vertical-type 1500 1900 1500 1900 1700 1900
1300 1300 1300 1300 1500 1300
2450 2450 2450 2450 2450 2450
Dimension (mm) Horizontal type 2450 2450 2450 2450 2450 2300
1210 1210 1210 1210 1450 1500
1600 2300 1600 2300 1600 2450
Maintenance spaces (mm) 1000(front, rear)
800(left sides)
1000(front, rear)
800(left sides)
1200(front)
1000(rear)
800(left sides)